Applied Surface Science · 1997 · 23 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsElectronic MaterialsCeramic ProcessingCeramic TechnologyEtching ProcessesLaser Material ProcessingLaser PhysicsLaser Surface ProcessingCeramic EtchingEtchingLaser Surface EtchingSilicon Carbide (Sic) MaterialsSilicon Carbide Ceramics
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Excimer laser assisted chemical machining of SiC ceramic
Yuko Hibi, Yûji Enomoto, Kaoru Kikuchi et al. · Applied Physics Letters · 1995 · 22 citations