Indium Ion Source

Abstract

An ion source that utilizes a continuously oxygenated porous tungsten surface to generate indium ions is described. Indium vapor supplied to the back of the tungsten ionizer from a reservoir percolates through to the front surface where the indium is evaporated as ions. An accel-decel electrode extraction system is used to increase the ion current capability of the source. The ionizer and reservoir are designed to operate at temperatures in excess of 1000°C and at voltages up to 20 keV. The peak ion current attained was 0.57 mA at an ion energy of 10 keV.