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Dosimetric evaluation of a pencil-beam algorithm for electrons employing a two-dimensional heterogeneity correction

Two-dimensional Heterogeneity CorrectionPencil-beam AlgorithmEngineeringPhysicsMeasurementCalibrationElectron-beam LithographyElectron SpectroscopyApplied PhysicsEducationElectron DiffractionComputational ElectromagneticsInstrumentationMicroelectronicsDosimetric EvaluationElectron Optic