Selective Growth of Straight Carbon Nanotubes by Low-Pressure Thermal Chemical Vapor Deposition

Abstract

Carbon nanotubes (CNTs) were grown by low-pressure thermal chemical vapor deposition using pure ethylene. It was found that straight CNTs, which were composed of bundled single- or double-wall CNTs and multiwall CNTs, were preferentially bridged between Fe nanoparticles under a low pressure of 100 Pa. Moreover, utilizing this method, we attempted to grow CNT bridges between patterned Ta electrodes. By nitriding the surface of the Ta electrodes, Fe nanoparticles with a moderate size were effectively formed, resulting in bridging CNTs between the electrodes.