Thin Solid Films · 1999 · 31 citations · 11 references
Materials ScienceAmorphous ZirconiumEngineeringSol-gel ProcessingCeramic MaterialApplied PhysicsStress DevelopmentThin FilmsThin Film ProcessingMicrostructure
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Ion-beam-assisted deposition of thin films
Peter Martin, H. A. Macleod, R. P. Netterfield et al. · Applied Optics · 1983 · 281 citations