Wear resistant TiMoN coatings deposited by magnetron sputtering

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Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum

O. Knotek, W.‐D. Münz, T. Leyendecker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 307 citations

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Superhard nanocomposite Ti1−Al N films prepared by magnetron sputtering

J. Musil, H. Hrubý · Thin Solid Films · 2000 · 256 citations

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