Journal of Applied Physics · 1986 · 41 citations · 6 references
Natural SciencesElectrical EngineeringPlasma PhysicsElectric PotentialPlasma ElectrodynamicsCapacitively Coupled PlasmasDirect Current DischargesExcitationGlow DischargesRadio-frequency Discharges
A simple model, using an asymmetrical double probe theory, is presented to describe a rf planar glow discharge. It reasonably agrees with available experimental results for a capacitively coupled excitation electrode and frequencies of about 100 kHz.
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Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system
Klaus Köhler, J. W. Coburn, D. E. Horne et al. · Journal of Applied Physics · 1985 · 399 citations
Static Theory of a Discharge Column at Intermediate Pressures
S. A. Self, H. Ewald · The Physics of Fluids · 1966 · 248 citations
Ion response to plasma excitation frequency
Richard H. Bruce · Journal of Applied Physics · 1981 · 101 citations