Vacuum · 1962 · 39 citations · 5 references
Natural SciencesMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsSemiconductor DevicesThin FilmsOxide SemiconductorsPlastic DeformationSilicon MaterialsStress-strain BehaviorThin Film Mechanical PropertiesThin Film StrainFilm StressFilm-substrate InteractionSilicon Dioxide
5
Vacuum deposition of dielectric films for capacitors
Gillian Siddall · Vacuum · 1959 · 86 citations
Natural Sciences, Materials Engineering, Materials Science +14
O.S. Heavens, S. D. Smith · Journal of the Optical Society of America · 1957 · 57 citations
Natural Sciences, Materials Engineering, Materials Science +17