Physical characterization and electrical properties of chelating-agents added PZT films

Abstract

Abstract In this study, the chelating agents including ethylene glycol, formamide, glycerol and acetylacetone were used to investigate their effect on perovskite formation, microstructure evolution and electrical properties of PZT films. Two different kind of heating profiles were used for comparison. With fast heating rate, PZT films added with either ethylene glycol or acetylacetone form a dense larger-grained microstructure and show a maximum Pr of ∼31 μC/cm2. On the other hand, in the heating schedule with a heating rate of 10°C/min, Pr reduction was observed except the glycerol-added PZT films because the addition of glycerol can much reduce the formation temperature of perovskite phase. Key Words: PZTsol-gelchelating agentsperovskiteremanent polarization