Particle simulation methods for studies of low-pressure plasma sources

Abstract

This paper illustrates the application of particle simulation methods for the description of low-pressure discharges: Townsend discharges, cathode fall dominated dc glows and capacitively coupled radiofrequency discharges. The spatially and/or temporally varying electric field and the presence of boundaries (e.g. electrodes) in these plasma sources induce a non-hydrodynamic (or non-equilibrium) transport of some types of charged species, particularly of electrons. Particle-based methods provide, even under non-equilibrium conditions, a correct method of mathematical description of the particle transport and the determination of the distribution functions, which are crucial quantities in discharge modeling.