Materials Science and Engineering A · 1998 · 52 citations · 14 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMechanical Behavior Of MaterialsThin FilmsOxide SemiconductorsResidual StressStrain HardeningStress RelaxationThermal Properties Of MaterialsThermal StressesOxide Layer GrowthStress Relaxation MechanismsStress Relaxation ModelingThermally Grown OxidesThin Oxide Layers
14