Ranges of ions with <i>Z</i>1⩾54 in Al and Al2O3

Abstract

Ranges of Xe, Cs, Eu, Au, and Tl in polycrystalline Al and anodic Al2O3 at 75–100 keV are reported. Ranges in Al2O3 are found to be about 30% higher than predicted by the LSS theory for all Z1. The shapes of the depth distributions are in excellent agreement with theoretical calculations. In Al, considerable deviations from theory for the most probable ranges and for the shapes of the distributions are found. These deviations are attributed to crystalline effects.