Microwave and Optical Technology Letters · 2005 · 13 citations · 5 references
EngineeringElectrical EngineeringMaterials ScienceHeat TransferMicrowave EngineeringThin FilmsMicrowave MaterialsMicrowave ResonatorsMicrowave Semiconductor DevicesThermal DesignThermal ManagementThermal Properties Of MaterialsAnnealingAnnealing ProcessesFilm Bulk Acoustic ResonatorsResonanceReturn LossThermal EffectsThermal TreatmentThermal Treatment Effects
This paper presents some methods to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on Bragg reflectors. Thermal treatments were done using sintering and/or annealing processes. The measurement shows a considerable improvement of return loss (S11) and quality factor (Qs/p). These thermal treatments seem very promising for enhancing the FBAR's resonance performance. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 47: 459–462, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.21199
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HIGH Q MICROWAVE ACOUSTIC RESONATORS AND FILTERS
Elecirodes Piezoelectric · 1993 · 278 citations
Film bulk acoustic wave resonator and filter technology
S. V. Krishnaswamy, J. Rosenbaum, S. Horwitz et al. · 2003 · 21 citations