Application of the combinatorial approach to the fabrication of a quantum well multiwavelength emitting chip

Abstract

In this letter, the combinatorial approach is applied to the fabrication of a quantum well multiwavelength emitting chip. The multispecies implantation is accomplished with arsenic followed by proton to shift the emitting wavelength. More than 20 different emitting wavelengths can be observed from a single chip. This combinatorial method shows promise for wavelength-division multiplex applications and can be used to set up a library of wavelength shifts via implantation doses and implantation species.