Effect of oxygen addition on microwave plasma CVD of diamond from CH4-H2 mixture - Concepedia

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Effect of oxygen addition on microwave plasma CVD of diamond from CH4-H2 mixture

54

Citations

2

References

1989

Year

Chia‐Fu Chen, Yen C. Huang, Satoru Hosomi, Isao Yoshida

Materials Research Bulletin

Ch4-h2 MixtureDiamond-like CarbonChemical EngineeringEngineeringNonthermal PlasmaHydrogenMicrowave Plasma CvdChemistryOxygen AdditionGas Discharge PlasmaPlasma Processing

References

	Year	Citations

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