Thin Solid Films · 2004 · 446 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationStructural AnalysisThin FilmsMicrostructure AnalysisResidual StressStrength Of MaterialsStress-strain BehaviorThin Film Mechanical PropertiesThin-film MaterialsFilm StrainFilm StressResidual Stress AnalysisResidual Stress CharacterizationResidual Stress EvaluationResidual Stress In Thin FilmsResidual Stress MappingStress Measurement
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