Influence of RF power and fluorine doping on the properties of sputtered ITO thin films - Concepedia

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Influence of RF power and fluorine doping on the properties of sputtered ITO thin films

17

Citations

29

References

2008

Year

M. S. Nisha, M. K. Jayaraj

Applied Surface Science

Electrical EngineeringFluorine DopingEngineeringPhysicsNanoelectronicsOxide ElectronicsSurface ScienceApplied PhysicsRf PowerSemiconductor MaterialThin FilmsMicroelectronicsThin Film Processing

References

	Year	Citations

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