Charged-particle activation analysis studies on carbon, nitrogen and oxygen mainly in semiconductor silicon - Concepedia

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Charged-particle activation analysis studies on carbon, nitrogen and oxygen mainly in semiconductor silicon

13

Citations

7

References

1976

Year

T. Nozaki, Y. Yatsurugi, Yoshiyuki Endo

Journal of Radioanalytical and Nuclear Chemistry

SemiconductorsSemiconductor DeviceEngineeringPhysicsNanoelectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorSemiconductor SiliconSilicon Debugging

References

	Year	Citations

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