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Substrate effect on the electrical properties of sputtered YSZ thin films for co-planar SOFC applications

Materials ScienceSubstrate EffectElectrical EngineeringEngineeringOxide ElectronicsSurface ScienceApplied PhysicsSemiconductor MaterialThin Film Process TechnologyThin FilmsElectronic PackagingElectrical PropertiesThin Film ProcessingCo-planar Sofc Applications