Ferroelectric and piezoelectric properties of 0.948(K0.5Na0.5)NbO3–0.052LiSbO3 lead-free piezoelectric thick film by aerosol deposition

Abstract

Lead-free, piezoelectric thick films of 0.948(K0.5Na0.5)NbO3–0.052LiSbO3 were fabricated by aerosol deposition and the effect of postannealing temperature on the dielectric, ferroelectric, and piezoelectric properties was investigated. The thickness of the films ranged from 5to17μm and highly dense films were obtained after deposition at room temperature. With increasing annealing temperature, the dielectric and ferroelectric properties were markedly increased. The maximum ferroelectric and dielectric properties of ε3T∕ε0=1012, Pr=15.5μC∕cm2, and d33=50pm∕V were obtained after annealing at 800°C for 1h. Above this temperature, the film exhibited rapid property degradation as it was decomposed due to Na2O evaporation.