Publication | Open Access
Phosphorus emitter engineering by plasma-immersion ion implantation for c-Si solar cells
16
Citations
8
References
2014
Year
Materials ScienceElectrical EngineeringPhosphorus Emitter EngineeringEngineeringIon ImplantationC-si Solar CellsApplied PhysicsPlasma-immersion Ion ImplantationSemiconductor Device FabricationSilicon On InsulatorPlasma ProcessingPhotovoltaics
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