Publication | Closed Access
Characterization of RuO2 and IrO2 films deposited on Si substrate
25
Citations
12
References
2001
Year
Materials ScienceMaterials EngineeringEngineeringOxide ElectronicsSurface ScienceApplied PhysicsIro2 FilmsThin FilmsSilicon On InsulatorEpitaxial GrowthChemical Vapor DepositionThin Film Processing
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