Highly Oriented ZnO Films Prepared by MOCVD from Diethylzinc and Alcohols

Abstract

Alcohols have been shown to be useful as oxidizing agents of diethylzinc for the growth of ZnO films by MOCVD. C -axis oriented ZnO films have been deposited on glass substrates at 300°C. The problem of a premature reaction, which is observed between diethylzinc and oxygen or water vapor, is shown to be overcome when alcohols are used instead. The formation, stability and decomposition of the precursor of MOCVD, e.g. , adducts, are discussed on the basis of a mass-spectroscopy analysis.