MOSFET Ultrasonic Surface-Wave Detectors for Programmable Matched Filters

Abstract

The piezoresistance effect in Si MOSFET p-channel inversion layers is utilized for the detection of elastic surface waves. Theoretical results for detector sensitivity are described. It is shown that arrays of such detectors can be used for programmable surface-wave signal processing. Variable delay-line operation and the correlation of phase-coded waveforms are demonstrated.