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Carrier lifetimes in ion-damaged GaAs
56
Citations
8
References
1989
Year
SemiconductorsSemiconductor TechnologyElectrical EngineeringIon ImplantationEngineeringSemiconductor DevicePhotoluminescenceApplied PhysicsMinimum LifetimeCarrier LifetimesCarrier LifetimeOptoelectronicsCompound SemiconductorIon Dose
Photoluminescence excitation correlation spectroscopy has been used to measure the dependence of carrier lifetime on the H+ ion implantation dose in GaAs. For doses greater than 1×1012 cm−2 the carrier lifetime is inversely proportional to the ion dose. The minimum lifetime measured was 0.6±0.2 ps for a dose of 1×1014 cm−2. Most important, there is no sign of saturation of carrier lifetime with ion dose down to this lifetime, thus still shorter lifetimes should be achievable with increased ion dose.
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