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Increased carrier lifetimes in GaN epitaxial films grown using SiN and TiN porous network layers
18
Citations
14
References
2005
Year
Materials SciencePoint DefectElectrical EngineeringWide-bandgap SemiconductorEngineeringSemiconductor TechnologyCrystalline DefectsApplied PhysicsAluminum Gallium NitrideGan Power DeviceCarrier LifetimesThin FilmsCarrier LifetimeGan Epitaxial FilmsCategoryiii-v SemiconductorGan Thin Films
Improved structural quality and radiative efficiency were observed in GaN thin films grown by metalorganic chemical vapor deposition on SiN and TiN porous network templates. The room-temperature decay times obtained from biexponential fits to time-resolved photoluminescence data are increased with the inclusion of SiN and TiN layers. The carrier lifetime of 1.86ns measured for a TiN network sample is slightly longer than that for a 200μm-thick high-quality freestanding GaN. The linewidth of the asymmetric x-ray diffraction (XRD) (101¯2) peak decreases considerably with the use of SiN and TiN layers, indicating the reduction in threading dislocation density. However, no direct correlation is yet found between the decay times and the XRD linewidths, suggesting that point defect and impurity-related nonradiative centers are the main parameters affecting the lifetime.
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