Low Temperature Preparation of Aluminum Titanate Film via Sol-Gel Method

Abstract

Aluminum titanate (Al 2 TiO 5 ) film was prepared via sol-gel method at low temperature, using ethyl acetoacetate and anhydrous citric acid as compound chelating agent, tetrabutyl titanate (Ti (OC 4 H 9 ) 4 ) and aluminum chloride (AlCl 3 . 6H 2 O) as precursors, ethanol as solvent. The phase transformation of Al 2 TiO 5 xerogel during heat treatment, the effect of different chelating agents on the synthesis of Al 2 TiO 5 , and the phase composition and morphology of film were investigated by means of differential thermal and thermo gravimetric analysis (DTA-TG), X-ray diffraction analysis (XRD), Fourier transform infrared spectroscopy (FTIR) and field-emission scanning electron microscopy (FE-SEM). The results demonstrate that Al 2 TiO 5 can be synthesized at 750 °C by using compound chelating agent, rather than single chelating agent. Compound chelating agent contributes to the formation of Al-O-Ti heterogeneous bond, which is the key to preparing Al 2 TiO 5 at low temperature. High quality Al 2 TiO 5 film could be coated on the SiC substract at 750°C.