Catalytic CVD growth of Si–C and Si–C–O alloy films by using alkylsilane and related compounds - Concepedia

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Catalytic CVD growth of Si–C and Si–C–O alloy films by using alkylsilane and related compounds

21

Citations

3

References

2003

Year

Hiroshi Nakayama, K. Takatsuji, Kenji Murakami, Y. Miura, N. Shimoyama, H. Machida

Thin Solid Films

Materials ScienceMaterials EngineeringChemical EngineeringCatalytic Cvd GrowthEngineeringSurface ScienceCatalysisThin Film Process TechnologyChemistryThin FilmsChemical DepositionRelated CompoundsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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