Publication | Open Access
Epitaxial grain growth in thin metal films
106
Citations
13
References
1990
Year
Materials ScienceMaterials EngineeringEpitaxial Grain GrowthEngineeringPhysicsGrain GrowthCrystal Growth TechnologySurface ScienceApplied PhysicsThin FilmsMolecular Beam EpitaxyEpitaxial GrowthCrystallographyThin Film ProcessingMicrostructure
Epitaxial alignment has been obtained by means of grain growth in polycrystalline films deposited on single-crystal substrates. A theory for epitaxial grain growth is outlined and results given for experiments on Au, Al, Cu, and Ag films on vacuum-cleaved NaCl, KBr, KCl, or mica. Epitaxial grain growth provides a fundamentally different alternative to conventional epitaxy, and can lead to very thin films with improved continuity and crystalline perfection, as well as non-lattice-matched orientations.
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