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Effect of substrate temperature on the structural, electrical, and optical properties of GZO/ZnO films deposited by radio frequency magnetron sputtering

Materials ScienceMaterials EngineeringElectrical EngineeringOptical MaterialsEngineeringOxide ElectronicsSubstrate TemperatureApplied PhysicsGzo/zno FilmsRadio Frequency MagnetronThin FilmsThin Film Processing