High-quality ZnO films prepared on Si wafers by low-pressure MO-CVD - Concepedia

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High-quality ZnO films prepared on Si wafers by low-pressure MO-CVD

96

Citations

11

References

2003

Year

K. Haga, Takayuki Suzuki, Y. Kashiwaba, H. Watanabe, Bin Zhang, Yasutomo Segawa

Thin Solid Films

Materials ScienceEngineeringOxide ElectronicsApplied PhysicsSemiconductor Device FabricationHigh-quality Zno FilmsThin FilmsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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