The effect of thickness on the properties of Ti-doped ZnO films by simultaneous r.f. and d.c. magnetron sputtering - Concepedia

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The effect of thickness on the properties of Ti-doped ZnO films by simultaneous r.f. and d.c. magnetron sputtering

59

Citations

24

References

2004

Year

Su-Shia Lin, Jow-Lay Huang, Ding‐Fwu Lii

Surface and Coatings Technology

Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsApplied PhysicsSimultaneous R.fTi-doped Zno FilmsD.c. Magnetron SputteringThin FilmsThin Film Processing

References

	Year	Citations

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