Studies of ultra shallow n+–p junctions formed by low-energy As-implantation - Concepedia

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Studies of ultra shallow n+–p junctions formed by low-energy As-implantation

10

Citations

8

References

2004

Year

D. Girginoudi, N. Georgoulas, A. Thanailakis, E.K. Polychroniadis

Materials Science and Engineering B

Semiconductor TechnologyEngineeringTunneling MicroscopyPhysicsApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationMicroelectronicsLow-energy As-implantationSemiconductor Device

References

	Year	Citations

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