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Effect of deposition power on structural and electrical properties of Al-doped ZnO films using pulsed direct-current magnetron sputtering with single cylindrical target

Materials EngineeringMaterials ScienceElectrical EngineeringAluminium NitrideEngineeringOxide ElectronicsApplied PhysicsDeposition PowerPulsed Direct-current MagnetronSingle Cylindrical TargetThin FilmsPulsed Laser Deposition