DC triode sputtering deposition and characterization of N-rich copper nitride thin films: Role of chemical composition - Concepedia

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DC triode sputtering deposition and characterization of N-rich copper nitride thin films: Role of chemical composition

50

Citations

24

References

2008

Year

N. Gordillo, R. González-Arrabal, Marisol Martín‐González, J. Olivares, A. Rivera, F. Briones, F. Agulló‐López, D.O. Boerma

Journal of Crystal Growth

Materials ScienceAluminium NitrideEngineeringDc TriodeNanoelectronicsChemical CompositionSurface ScienceApplied PhysicsThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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