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Use of the magnetron-sputtering technique for the control of the properties of indium tin oxide thin films

Materials ScienceMaterials EngineeringIndium TinEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsMagnetic Thin FilmsThin FilmsMagnetron-sputtering TechniqueMicroelectronicsChemical Vapor DepositionThin Film Processing