Publication | Closed Access
TiAlN coatings deposited by triode magnetron sputtering varying the bias voltage
107
Citations
43
References
2011
Year
Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringSurface ProcessingSurface ScienceApplied PhysicsTriode MagnetronBias VoltageMicroelectronicsTialn CoatingsDepth-graded Multilayer CoatingProtective Coating
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