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The spray-ILGAR® (ion layer gas reaction) method for the deposition of thin semiconductor layers: Process and applications for thin film solar cells

Electrical EngineeringEngineeringThin-film FabricationSurface ScienceApplied PhysicsThin Semiconductor LayersChemical Vapor DepositionThin Film Process TechnologyThin FilmsChemical DepositionPlasma ProcessingPhotovoltaicsThin Film Processing