Hardness and surface roughness of hydrogenated amorphous carbon-based films synthesized by atmospheric pressure-plasma enhanced chemical vapor deposition at low temperature - Concepedia

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Hardness and surface roughness of hydrogenated amorphous carbon-based films synthesized by atmospheric pressure-plasma enhanced chemical vapor deposition at low temperature

14

Citations

27

References

2012

Year

Mayui Noborisaka, Ryohei Horikoshi, So Nagashima, Akira Shirakura, Tetsuya Suzuki

Thin Solid Films

Materials ScienceEngineeringSurface RoughnessSurface ScienceApplied PhysicsThin FilmsChemical Vapor DepositionAtmospheric Pressure-plasmaPlasma ProcessingThin Film Processing

References

	Year	Citations

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