A Modulated DLTS Method for Large Signal Analysis (C²-DLTS)

Abstract

For the analysis of deep-level parameters in semiconductors, a new DLTS (Deep-Level Transient Spectroscopy) method has been proposed, in which a squaring device for the capacitance-signal processing is used with the conventional DLTS system. This method (C 2 -DLTS) is simple and is especially effective in the precise analysis of large signals due to deep-level impurities and defects.