Dielectric properties of RF plasma-deposited a-C:H and a-C:H:N films - Concepedia

Concepedia

Publication | Closed Access

Dielectric properties of RF plasma-deposited a-C:H and a-C:H:N films

10

Citations

7

References

2000

Year

L. A. Romanko, A.G. Gontar, A. M. Kutsay, S.I Khandozko, V. Yu. Gorokhov

Diamond and Related Materials

Dielectric PropertiesEngineeringApplied PhysicsThin FilmsGas Discharge PlasmaPlasma ProcessingElectrical Insulation

References

	Year	Citations

Page 1