Publication | Closed Access
Vaporized-metal cluster formation and effect of kinetic energy of ionized clusters on film formation
44
Citations
4
References
1982
Year
Materials ScienceVaporized-metal Cluster FormationCluster ScienceEngineeringNanoclusterIonized ClustersApplied PhysicsKinetic EnergyCluster ChemistryChemistryChemical DepositionChemical Vapor Deposition
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