Effect of Carbon on Formation of Electron-Irradiation-Induced Secondary Defects in Silicon - Concepedia

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Effect of Carbon on Formation of Electron-Irradiation-Induced Secondary Defects in Silicon

19

Citations

3

References

1986

Year

Masami Hasebe, Ryuichiro Oshima, Francisco Eiichi Fujita

Japanese Journal of Applied Physics

Electrical EngineeringEngineeringApplied PhysicsDefect FormationSemiconductor Device FabricationElectron-irradiation-induced Secondary DefectsSilicon On InsulatorDefect ToleranceSilicon Debugging

References

	Year	Citations

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