Concepedia

Publication | Closed Access

Investigation of the effects of room-temperature nitrogen implantation on the precipitation of aluminium nitride

DOI

20

Citations

15

References

1991

Year

Anthony P. Matthews, M. Iwaki, Y. Horino, Mamoru Satou, K. Yabe
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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