Surface modification of TiN films by nitrogen ion beam irradiation in ethylene gas atmosphere - Concepedia

Concepedia

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Surface modification of TiN films by nitrogen ion beam irradiation in ethylene gas atmosphere

16

Citations

6

References

2004

Year

Isao Nakamura, Daisuke Matsui, Michiko Sasaki, Ichiro TAKANO, Yoshio Sawada

Materials ScienceSurface CharacterizationTin FilmsEngineeringSurface AnalysisSurface ScienceApplied PhysicsSurface ModificationThin FilmsEthylene Gas AtmosphereSurface ProcessingChemical Vapor Deposition

References

	Year	Citations

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