Applied Physics Letters · 1990 · 46 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistryThin FilmsOptical Thin FilmsOxide SemiconductorsThin Film Electrical PropertiesThin Film Optical PropertiesThin-film DepositionThin-film MaterialsResistivityThin Oxide FilmsThin Oxide LayersThin-film Growth MechanismsTin OxidesTransparent Conducting FilmsTransparent Conductive FilmsVisible Light Transmittance
Conducting and transparent thin films of tin oxide were prepared by the laser evaporation of an undoped powder-pressed polycrystalline tin oxide target onto unheated substrates. After characterizing these films, the results reveal that the films are highly oriented and with a grain size ∼0.2 μm. The nearly stoichiometric deposition of tin oxide films with deposition rates exceeding 24 Å per pulse was obtained by this method. The lowest resistivity obtained is 3.0×10−3 Ω cm. The visible transmittance (between 4000 and 7000 Å) is above 75%.
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Laser evaporation deposition of superconducting and dielectric thin films
Hoi Sing Kwok, P. Mattocks, X. W. Wang et al. · Applied Physics Letters · 1988 · 78 citations