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Microstructure and electric properties of the PZT thin films fabricated by ECR PECVD: the effects of an interfacial layer and rapid thermal annealing

Materials ScienceMaterials EngineeringPzt Thin FilmsEngineeringApplied PhysicsRapid Thermal AnnealingEcr PecvdThin FilmsMolecular Beam EpitaxyEpitaxial GrowthThin Film ProcessingElectrical Insulation