A Millimeter-Scale Energy-Autonomous Sensor System With Stacked Battery and Solar Cells

Abstract

An 8.75 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> microsystem targeting temperature sensing achieves zero-net-energy operation using energy harvesting and ultra-low-power circuit techniques. A 200 nW sensor measures temperature with -1.6 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">°</sup> C/+3 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">°</sup> C accuracy at a rate of 10 samples/sec. A 28 pJ/cycle, 0.4 V, 72 kHz ARM Cortex-M3 microcontroller processes temperature data using a 3.3 fW leakage per bit SRAM. Two 1 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> solar cells and a thin-film Li battery power the microsystem through an integrated power management unit. The complete microsystem consumes 7.7 μ W when active and enters a 550 pW data-retentive standby mode between temperature measurements. The microsystem can process temperature data hourly for 5 years using only the initial energy stored in the battery. This lifetime is extended indefinitely using energy harvesting to recharge the battery, enabling energy-autonomous operation.