Concepedia

Publication | Closed Access

Chemical mapping of patterned polymer photoresists by near-field infrared microscopy

DOI

13

Citations

14

References

2001

Year

Bogdan Dragnea, Jan Preusser, Jodi M. Szarko, Laurie A. McDonough, Stephen R. Leone, William D. Hinsberg
Applied Surface Science

References

YearCitations

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