Residual stresses and clamped thermal expansion in LiNbO₃ and LiTaO₃ thin films

Abstract

Residual stresses in LiNbO3 and LiTaO3 epitaxial thin films were evaluated taking into account Li nonstoichiometry by means of Raman spectroscopy and x-ray diffraction. The epitaxial films were grown on C-cut sapphire substrates by pulsed injection metal organic chemical vapour deposition. Clamping of the epitaxial films by the substrate induced a transfer from the in plane thermal expansion to the out of plane component. The temperature of the phase transition of clamped LiTaO3 films was close to that expected for a bulk sample.